ECE 7590
:
Microelectromechanical Sys
Principles, applications, and engineering of micro- electromechanical systems. Various MEMS designs and fabrication technologies are studied that are currently employed in a wide range of devices for actuation, sensing, micro-fluid manipulations, and RF and optical applications. Projects using MEMS device layout and simulation tools. Laboratory exercises with simple MEMS actuating devices.
Prerequisites
ECE 3500